摘要
通过磁控反应溅射在H1模具钢表面沉积了CrN薄膜。用扫描电镜(SEM)、X射线衍射仪(XRD)观察了试样的表面形貌,进行了物相分析,研究了CrN薄膜的抗氧化性能,讨论了膜层的抗氧化行为和机制。结果表明:在500℃以下,CrN膜层具有良好的抗氧化性,能大大提高基体的抗氧化性能。当温度超过600℃时,由于膜层产生剥落而失去使用性能。
CrN films have been prepared on H13 mould steel by magnetron reactive sputtering. The surface oxidation and microstructure of these films were characterized by scanning electron microscopy （SEM） and X-ray diffraction （ XRD）, and the oxidation resistance of CrN films was studied, The oxidation resistance behavior and mechanism of plating were also discussed. The results showed that the oxidation resistance of CrN film was excellent below 500℃ and the oxidation resistance of substrate was greatly improved with CrN films. While above 600℃, the plating will lose its application properties due to desquamate.
出处
《表面技术》
EI
CAS
CSCD
2005年第6期40-41,44,共3页
Surface Technology
基金
扬州大学自然科学基金资助项目(JK0313088)
关键词
磁控溅射
CRN薄膜
抗氧化性
Magnetron sputtering
CrN film
Oxidation resistance
