摘要
简单介绍了激光清洗在微电子领域应用的优势,分析了激光清洗微电子元件的主要机理以及影响微电子元件清洗的主要因素,最后指出了这方面的应用情况。
In this paper, the advantage of the laser- cleaning for removal of small particles on the microelectronic element, was simply summarized. Then its mechanism and main influence factors were discussed. Finally the applications were also introduced.
出处
《清洗世界》
CAS
2006年第1期38-43,共6页
Cleaning World
关键词
细小微粒
近场光学聚焦
紫外激光
small particles
near- field optical focusing effects
ultraviolet laser
