摘要
二氧化锡具有灵敏度高,工作温度低、电路简单、造价低廉等特点, 广泛用作硅基微结构气敏传感器的气敏材料。在二氧化锡薄膜中有意识地掺入适量催化剂,可提高气体敏感度,本文开展乙醇气敏机理的研究,进行气敏薄膜制备和掺杂后敏感度测试。
The SnO2 has such feature as high sensitivity, low operatio n temperature, simple circuit, and low pdce, so it is wildly used as material of gas sensor. Seemly activator consciously mixed in the SnO2 film, improve the film＇s gas sensitivity. The paper studies the mechinery of alcohol gas sensitivity, manufactures the gas sensitivity film and test the sensitivity of impure SnO2 film.
出处
《仪器仪表用户》
2006年第3期143-145,共3页
Instrumentation
基金
国家自然科学基金项目资助(50405033
50575078)
关键词
传感器
乙醇
薄膜
工艺
Sensor,Alcohol,Film,Processing
