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电解加工在微细制造技术中的应用研究 被引量:9

The study of application of electrochemical micro-machining in micro fabrication technologies
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摘要 电解加工是利用阳极金属电化学溶解原理来去除材料的制造技术,这种微去除方式使得电解具有微细加工的可能,这里着重探讨了高频窄脉冲微细电解加工技术、电液束微细电解加工技术和利用电解制备微细电极的工作原理,技术特点,应用领域和加工精度,并详细的讨论了目前微细电解加工脉冲电源和加工设备的研制和发展。 Electrochemical machining (ECM) is a kind of craft method that utilizes metal anode electrochemical dissolution principle to process shaping. This micro- dissolution mode makes ECM have the possibility used in micro fabrication.The paper focuses on the work principle, technology characteristics and application range of high frequency short pulse electrochemical machining and electro - stream electrochemical micro - machining( EMM ) . Moreover, the paper also discusses the study and development of machine tools and pulse electro source applied in EMM.
作者 李志永 季画
出处 《机械设计与制造》 北大核心 2006年第6期77-79,共3页 Machinery Design & Manufacture
关键词 电解 微细加工 电极 脉冲 Electrochemical machining Micro machining Eelectrode Pulse electro
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