摘要
基于相移干涉术,研制了立式大视场Mirau相移显微干涉仪,它包括干涉成像和照明系统、竖直方向上的压电陶瓷传感器(PZT)微位移系统、被测面的两维扫描系统、图像采集和处理系统,是无限筒长显微镜结构和Mirau干涉结构的叠加。大视场表面形貌通过多孔径扫描拼接实现。单片机串口控制电路控制电控平移台的精确位移,实现了被测面的两维扫描,最小的横向位移为0.039μm,扩展后的视场达到12.5mm×12.5mm。测量了光纤连接器端面的表面形貌,重复测量精度小于2nm。
A vertical-shaft-type large field Mirau phase shifting interference microscope is developed based on phase shifting interferometry. The interference microscope consists of the interference imaging and illumination part, piezoelectric transducer（PZT） in the vertical direction,two-dimensional（2-D） scanning part in the test surface, image capture and processing part. The structure of interference microscope is a combination of the infinity tube microscope structure and Mirau interference configuration. The large field surface topography of test is reconstructed by the multi-aperture stitching. The test surface 2-D scanning system is realized by the movement of precision motorized stage,which is controlled by the computer through the microcontroller serial circuit. The minimal lateral movement distance is 0. 039 μm. The extended field will reach up to 12.5 mm × 12.5 mm. The end surface of optic fiber connector is measured and the repeatability is less than 2 nm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2006年第8期934-936,共3页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(60377031
60577013)
国家"973"计划资助项目(2003CB314907)
新世纪优秀人才支持计划资助项目
关键词
相移干涉术
显微干涉术
压电陶瓷传感器(PZT)
多孔径拼接
表面形貌
phase shifting interferometry
interference microscopy
piezoelectric transducer （PZT）
multiaperture stitching
surface topography
