摘要
本装置是在具有高精度导轨的SIP三坐标测量机上,架设激光干涉仪作为测量标准器,利用电感测微仪作为瞄准器,使测量可以直接溯源到激光波长,实现了1等标准光滑圆柱环规的高精度测量。装置对Φ50mm标准环规直径测量的不确定度达到了0.15μm。通过与瑞士国家计量局和国家计量院的比对测量证实,无论在国内还是国际环规测量方面,该装置已达到先进水平。
This advice is composed of precision guide , laser interferometer and micrometer. The laser interferometer is a measurement standard. It can be trace to light wavelength. The expanded uncertainty of measuring the standard ring for 50mm diameter is 0.15μm. The measurement results of comparison with National Institute of Measurement and METAS make sure that the advice has reached international developed level.
出处
《上海计量测试》
2006年第4期13-15,共3页
Shanghai Measurement and Testing
关键词
激光干涉仪
1等标准环规
直径测量
比对测量
Laser interferometer
standard ring of grade 1
diameter measurement
comparison
