摘要
薄膜表面缺陷密度统计是改进薄膜表面质量的重要依据。阐述了基于遗传算法的二维最大熵分割算法的原理及实现步骤。采用这种算法对薄膜缺陷图像进行分割,对分割后的图像进行了薄膜缺陷密度的测量。实验结果表明,这种方法对薄膜表面缺陷提取简单且易于测量,为分析缺陷原因提高薄膜质量起到重要的指导作用。
Density extraction of optical surface defects is very important for the later processing. Firstly, we expatiate the segmentation algorithm theory of two dimension maximal entropy based on inheritance algorithm. And then we segment a defect image and measure it＇s defects density. The experiment shows that the result of processing method makes the density extraction of defects for the optical coating surface simple and detectable, which will improve the quality of optical coating.
出处
《光学仪器》
2006年第4期118-123,共6页
Optical Instruments
关键词
光学薄膜
图像分割
遗传算法
二维最大熵
缺陷密度
optical coating
image segmentation
inheritance algorithm
two dimension maximal entropy
defect density
