摘要
对圆形膜片、正方形膜片及矩形膜片压力传感器的灵敏度进行了详细剖析.计算并列出大量数据,指出影响压力传感器灵敏度的因素及提高器件灵敏度的有效途径,给出部分实验数据与理论分析符合较好.本分析对开发设计新型高灵敏度的压力传感器有一定指导意义.
In this paper, the sensitivity of pressure sensor for circular, square and rect-angular diaphragm are analysed in detail; it was made on the basis of definition sensitivi-ty of pressure resistance sensor. By the calculation, the great quantity data have beengiven, the factors of influence pressure sensor sensitivity and the effect on increasingsensor sensitivity have been directed. These analyses have specified direct significancesfor development, designation of new type higher sensitivity sensor.
出处
《传感技术学报》
CAS
CSCD
1996年第4期59-65,共7页
Chinese Journal of Sensors and Actuators
关键词
压阻效应
灵敏度
应力
膜片
压力传感器
pressure-resistance effect
sensitivity
stress
diaphragem
