摘要
提出了一套对椭偏仪的测量误差进行有效修正的方案,设计了一个Windows版的椭偏仪测厚数据处理软件,并在该软件中嵌入了对测量数据的误差进行修正的方法,使椭偏仪的最终测量结果更加精确。制作了30片厚度梯度分布的标准样片(厚度20nm^1μm),用于从“软”、“硬”件两个方面对椭偏仪进行误差修正,使最终的误差小于1%。本文所提出的修正方案具有一定的普适性、实用性。
An effective scheme for correcting the error of ellipsometer was worked out. And a Windows-version software for processing the data of ellipsometer was designed, in which a method of error correcting for the data measured by ellipsometer was embedded to make the final result more accurate. 30 thickness-grads-distributing samples （thickness from 20 nm to μm） were prepared to correct the error both by hardware and software. And the final errors are less than 1%. The scheme given in this paper is practical and can be widely used.
出处
《光电子技术》
CAS
2006年第3期208-210,216,共4页
Optoelectronic Technology
基金
上海微系统所传感技术联合国家重点实验室开放基金(SK00401)
关键词
椭偏仪
薄膜厚度测量
误差修正
软件
ellipsometer
measuring thickness of thin film
error correcting
software
