摘要
等离子体源离子注入技术是一种新型的非视线的离子注入材料表面改性技术。为了对该项技术的表面改性效果进行科学的论证,从而为该项技术的推广提供客观的试验依据,采用该项技术对Ti6A14V合金进行氮离子注入,对注入层的成分、组织和性能进行了分析。结果表明:注入层中氮浓度的分布具有类高斯分布特征;在注入层中有TiN和非晶态相形成;注入层的显微硬度和摩擦性能得到了明显的改善。
Plasma source ion implantation is a new non-line of sight ion implantation technique for surface modification of materials. For proving scientifically the surface modification effect of this technique and so providing the objective test proofs for the popularization of this technique. This technique was used for modification of Ti6A14V alloy with nitrogen ions. The concentration, microstructure and properties of the implanted layer were analyzed. The results show that the distribution of the nitrogen concentration in the implanted layer has the like Gauss, titanium nitride and amorphous phase have formed in the implanted layer, and the microhardness and friction properties are improved obviously.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2006年第5期582-585,共4页
Chinese Journal of Rare Metals
基金
西南交通大学校基金(2004A01)
全方位离子注入表面改性
中国科学院上海微系统与信息技术研究所离子束重点实验室基金(100027)
全方位离子束增强沉积陶瓷薄膜研究
