摘要
采用溶胶凝胶法制备透明导电膜,并考察了Sb的掺杂量、热处理温度对薄膜方块电阻以及对薄膜透光率的影响。在SnO_2掺杂1．0%(wt)Sb能显著提高薄膜的电导性,制得的透明导电膜表面电阻率最低为ρ=16×10^(-3)Ω·cm,且薄膜的连续性、致密性好,透光率达到90%以上。
Transparent conductive film was prepared by sol-gel method. The effects of Sb-doping amount and heat treatment temperature on resistance and transmittance of the conductive film were studied. The results showed that with 1.0%（wt） amount of Sb-doping, a good continuous and dense SnO2 transparent conductive film was obtained with surface resistance down to p=16×10^-3Ω·cm and transmittance up to 90%.
出处
《陶瓷学报》
CAS
2006年第4期363-369,共7页
Journal of Ceramics
关键词
掺杂Sb
SNO2薄膜
透明导电膜
导电性
SnO2 thin films, Sb-doping, transparent conductive film, sol-gel method, conductivity
