摘要
介绍了一种新型纳米三坐标测量机二维定位平台的结构设计:平台设计了无爬行的磁浮-滑动复合导轨;引入了“共平面“的导向模式,实现近零阿贝误差;并对二维定位平台力平衡和系统热效应作了优化设计。计算和实验结果表明,平台能有效解决低速驱动时的爬行问题,实现微小步距进给,满足微纳米级定位平台的要求。
This paper introduces a kind of two-coordinate platform of novel coordinate measuring machines（CMM） with nanometer resolution. The magnetic suspension rail without creep is designed. ＂The same plane＂ oriented mode is adopted and the result shows that the Abbe error is decreased to almost zero. Also improved are the designs of force balance and the heat system of the two-coordinate platform. Calculations and experiment results show that creep is solved when the platform is driven slowly and the tiny moving step is realized,thus meeting the requirements of nano-platforms.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
北大核心
2006年第12期1605-1608,共4页
Journal of Hefei University of Technology：Natural Science
基金
国家自然科学基金国际重大合作资助项目(50420120134)
安徽省高等学校省级重点实验室资助项目
关键词
纳米二维定位平台
磁浮式
共平面
阿贝误差
力平衡
two-coordinate platform
magnetic suspension
the same plane
Abbe error
force balance
