摘要
传统的数控机床进给轴定位精度的检测方法,存在精度低、方法落后、检验重复性差等缺点。因此,采用目前国际先进的激光干涉法检测混联复合机床转台的定位精度,以评价和提高其精度。对干涉仪的测量原理、测量方法和数据处理进行了分析,认为空气折射率是干涉仪应用中的主要误差来源,并分析了其原因和补偿方法。最后,给出了基于激光干涉仪的机床定位精度检测和补偿方案。
The traditional positioning accuracy detection method of feed shaft for numerical control （NC） machine tool exists low accuracy, method obsolete and poor measurement repeatability. Therefore, positioning accuracy of revolving stage on hybrid NC machine tools is measured by using interferometer metering technique that is generally accepted at present in the world, in order to evaluate and improve the accuracy of revolving stage. The principle of measure, measuring method and data processing of the laser interferometer are analyzed. Air refractivity is thought as the main source of error during the application of laser interferometer, the reason and compensation method of errors are analyzed. The schemes of positioning accuracy detection and compensation of machine tools on laser interferometer are presented.
出处
《传感器与微系统》
CSCD
北大核心
2006年第12期70-72,共3页
Transducer and Microsystem Technologies
基金
教育部"高等学校博士学科点专项科研基金"资助项目(20050700007)
关键词
混联数控机床
转台
定位精度
检测
hybrid numerical control （NC） machine tools, revolving stage, positioning accuracy, detection
