摘要
利用位移电流效应设计的非接触式接近传感器结构简单,单探测电极,不受静态环境影响,价格便宜.该传感器探头面积大小,延展距离,形状可根据需要任意设计,且传感器对厚度敏感并可透过物体进行探测.该传感器可用于微机电测量系统(MEMS),安保和材料内部缺陷的无损检测等应用领域.
A novel non-contact proximity sensor is proposed for detecting proximity of any kind of materials based on the displacement current effect. The sensor needs only single probe is simple and inexpensive, and is not influenced by static environment. It is sensitive in thickness and may detect objects＇ defects in- side. The Area, shape of the sensor probe and the exploration distance can be designed arbitrarily by needs. The sensor may be applied in the micro-electromechanical system （MEMS）, sate guard system, nondestructive exploration for material interior damage, etc.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第6期2414-2417,共4页
Chinese Journal of Sensors and Actuators
基金
重庆市科委自然科学基金项目资助(8576
8579)
重庆市教委项目资助(011609)
关键词
位移电流
非接触
接近传感器
displacement current
non-contacts proximity sensor
