摘要
采用微机电系统(MEMS)技术设计制作了一种微冲击开关,其敏感元件由悬臂梁支撑的质量块和其下的微触点构成。在冲击加速度作用下,质量块与触点碰撞实现接通。开关芯片体积为5 mm×5 mm×0.5 mm,动作门限3 000g,响应时间84μs,能承受极端的高冲击而不破坏。
The impact switch is a kind of inertial device that can sense impact acceleration and output on-off signal. A micro-mechanical impact switch is designed and fabricated with MEMS technology. The sensitive unit of the micro impact switch consists of a seismic mass supported with a cantilever beam. The movable mass is displaced to contact the micro electrode tip when subjected to impact acceleration. The chip size of the switch is 5 mm×5 min×0.5 mm and the switch threshold is 3 000g while the response time is 84μs. It can survive ultra-high g-loads impact.
出处
《爆炸与冲击》
EI
CAS
CSCD
北大核心
2007年第2期190-192,共3页
Explosion and Shock Waves
