摘要
运用热力学对用ＴｉＣｌ３为钛源在低温下化学气相沉积ＴｉＮ的可行性进行了论证，着重介绍了实验研究及实验结果。在所设计的ＴｉＣｌ３生成以及ＴｉＮ形成的实验装置上，通过对ＨＣｌ（ｇ）与ＮＨ３的流量和沉积总压强的调节与控制，在较低的温度（５５０℃）下，在钢基材料上获得了ＴｉＮ表面涂层。
The thermodynamic analysis of reactions of low temperature CVD TiN coatings with TiCl 3 is performed in this paper.In self made testing equipment and the temperature of 500～600℃,the golden TiN coatings on the steel substracts were obtained through the control of the flow of HCl(gas)and NH 3(gas)and whole pressure while deposition.The results also indicated that the trace oxygen had a considerable effect on the quality of TiN coatings in the deposition system.
基金
湖北省自然科学基金
