摘要
提出了一种应用于压电叠堆泵的微位移放大机构,该机构以压电叠堆(积层式压电微位移器)为驱动元件,通过基于三角形放大原理的柔性铰链放大机构,放大压电叠堆的输出位移。同时,设计、研制了实验装置,并在试制样机上对其静、动态特性进行了实验。实验测试结果表明:该机构对压电叠堆输出位移的放大倍数达到5倍,并且该机构具有线性良好、高分辨率、高频响应等特点。由有限元分析得到的固有频率达到了1.8 kHz,实际测量的固有频率为1.5 kHz。
A micro-displacement magnifying mechanism used in piezo-stack pump is presented. Taking the piezoelectric multilayer actuators as drivers of amplifier, the displacement of piezoelectric multilayer actuator is amplified with the flexure hinge amplifier based on the principles of triangle amplification. The static and dynamic characteristics are tested on the prototype,the characteristics of good linearity, high resolution and high frequency are approved. Experimental results conclude that the mech anism can amplify the displacement to 5 times. The natural frequency reaches 1.8 kHz by finite element analysis while the actual measurement result is 1.5 kHz.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第6期884-888,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.50575093No.50605027)
关键词
压电叠堆泵
放大机构
微位移
柔性铰链
三角形放大
piezo-stack pump
magnifying mechanism
micro-displacement flexure hinge
triangle amplification
