摘要
以激光干涉为理论基础,采用具有不同表面光学特性的单晶硅片和K-8光学玻璃为样品,针对不同的测量条件,研究干涉条纹对比度变化对温度测量的影响.分析了薄片干涉条纹对比度与测量光束直径、入射角、样品表面粗糙度以及表面镀膜之间的相互关系,研究了薄片的横向温度梯度对干涉对比度的影响.实验结果表明,上述各因素对温度测量参量对比度产生的影响具有规律性,并在一定对比度阈值条件下,能够满足精确测温的条件要求.
Based on laser interference theory, the mono-crystalline silicon slice with various surface optical characteristics and K-8 optical glass were studied. The contrast change of interference fringe impacting temperature measurement of these slices was researched. The contrast of interference fringe depended on measuring light beam, reference angle, surface roughness and surface coating film was analyzed. The transverse temperature gradient of these slices impacting the contrast of interference fringe was discussed. The result indicated that the method for laser interferometry can fulfil the condition for measuring accurately temperature of the slice surface with non-ideal in the condition of some contrast threshold.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2007年第11期2115-2119,共5页
Acta Photonica Sinica
基金
广东海洋大学引进人才启动基金(E05102/051202)资助
关键词
干涉测量
测温法
对比度
粗糙度
对比度禁区
Interferometry
Thermometry
Contrast
Roughness
Contrast forbidden-region
