摘要
从氧化物表面的吸附特点出发，认为表面ＯＨ对湿度敏感起着非常重要的作用；在此基础上解释了湿度传感器中电子电导和离子电导同时存在的微观机理，并给出它们随环境湿度变化的数学关系．理论计算得到的阻湿特性与实验结果符合得很好；
Based on the characteristics of surface adsorption, it is reasonable to think that the OH groups present at the surface of the oxides play an important role in the conductance process. We have successfully explained the micro mechanism that the electronic conductance and ionic conductance exist simultaneously in the whole relative humidity range, and the relation between the sensor impedance and relative humidity has been derived from above viewpoint. The impedance humidity characteristics derived from theoretical calculation well agree with the experimental results. The theory can also explain the fast response of humidity sensors.
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
1997年第8期39-43,共5页
Journal of Xi'an Jiaotong University
关键词
电子电导
湿敏材料
氧化物半导体
湿敏电导
impedance humidity characteristics OH groups electronic conductance ionic conductance
