摘要
本文介绍了采用静电探针的逐点测量法和锯齿渡扫描测量法来测量离子源放电中等离子体参数,在此基础上利用静电探针所测量的离子饱和流信号作为控制部分反馈变量,使用闭环控制对22厘米双潘宁离子源的等离子体进行调节,并且利用探针所测量的结果对弧特性进行了初步的分析。
In this paper, measurement of step-by-step and sawtooth wave scan are used to measure the plasma parameter with electrostatic probe in the ion source discharge is briefly introduced. Based on this, using the ion saturation currents which measured by electrostatic probe as the feedback variables, and using closed-loop control to modulate the plasma of 22cm duoPIGatron ion source. Besides, make use of the result which measured by electrostatic probe to analysis the arc characteristic primarily.
出处
《核电子学与探测技术》
CAS
CSCD
北大核心
2007年第6期1200-1204,共5页
Nuclear Electronics & Detection Technology
基金
国家自然科学基金(10575105)
关键词
静电探针
等离子体参数
双潘宁离子源
弧特性
electrostatic probe
plasma parameter
duoPIGatron ion source
arc characteristic
