摘要
基于MEMS技术研制的微电容传感器,其有效电容的实际变化量仅为飞法级。实验表明,二元调宽式信号拾取专用集成电路BH5001为检测微电容变化量建立了一个高信噪比的平台,结合优良的巴特沃斯低通滤波器和高品质的差动放大器,即可完成微电容的检测。
The effective capacitance of micro-capacitance transducer based on MEMS technology varies only at the fFlevel. Experiments show that BH5001, which is the ASIC for picking up two-elements width-modulation signal, establishes a high signal-noise-ratio platform for detecting the variation of micro-capacitance. Accordingly the detecting of micro-capacitance will be completed with the combination of Butterworth filter and high quality differential amplifier.
出处
《传感器世界》
2008年第3期46-49,共4页
Sensor World
关键词
电容传感器
微电容检测电路
二元调宽
信号拾取
BH5001
capacitive transducer
micro-capacitance
detecting-circuit
picking up
two-elements width-modulation
BH5001
