摘要
将在酸性介质中产生了隧道孔的铝箔置于中性侵蚀液中继续成长。发现中性侵蚀液的组分对铝箔隧道孔形貌的影响规律:当溶液仅含Cl–时,会有新的隧道孔产生,铝箔表面隧道孔分布密度从3.63×107cm–2增加为3.72×107cm–2,隧道孔平均孔径从0.40μm扩展到0.75μm,但隧道孔长度没有明显变化;在含Cl–电解质中添加少量有机添加剂时,铝箔表面没有新的隧道孔产生,由于出现并孔现象,隧道孔分布密度反而从3.63×107cm–2降低至3.43×107cm–2,但隧道孔的孔径从0.40μm扩展到0.80μm,长度从24μm增加到37μm。
Tunnels in Al foils were developed in neutral solution after they had been produced in acidic solution. The effect of the composition in neutral electrolyte solution on tunnel morphology is discovered： when the solution containing Cl ions without any addition is used as electrolyte, the distribution density of tunnels is increased from 3.63 × 10^7 cm^-2 to 3.72 ×10^7 cm^-2, the average size of tunnels is enlarged from 0.40 μm to 0.75 μm, but the tunnel length has no obvious change; when some organic compound is dissolved in the neutral electrolyte, the distribution density of tunnels is decreased from 3.63× 10^7 cm^-2 to 3.43×10^7 cm^-2, hut the tunnel average size is changed from 0.40 μm to 0.80 μm, and the tunnels length is increased from 24 μm to 37 μm.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2008年第5期56-58,共3页
Electronic Components And Materials
关键词
电子技术
铝箔
侵蚀
形貌
隧道孔
电容器
electron technology
aluminum foil
etching
morphology
tunnel hole
capacitor
