摘要
建立了一套利用高功率YAG激光器辐照固体锡靶产生高转换效率极紫外光(extreme ultraviolet)源的实验装置.利用建立的实验装置开展了极紫外光源的强度和转换效率与抽运激光强度关系的实验研究,发现极紫外光源的转换效率随抽运激光强度的变化具有饱和效应.实验发现:当抽运激光能量达到250mJ时,极紫外光源的转换效率最高,波长为13.5nm处0.27nm带宽范围内的极紫外光源的能量转换效率为1.6%,此时对应的激光强度为1.8×1011W/cm2.
An experimental system has been set up for producing extreme ultraviolet light with high conversion efficiency by employing high power YAG laser irradiated tin slab.The dependence of extreme ultraviolet light intensity and conversion efficiency on the pump energy were studied,and the saturation effect of conversion efficiency was observed.The highest conversion efficiency of 1.6% in producing 13.5nm extreme ultraviolet light with 0.27nm bandwidth was achieved at pump energy of 250mJ,which corresponds to an intensity of 1.8×10^11W/cm2.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2008年第8期5100-5104,共5页
Acta Physica Sinica
基金
上海市科学技术委员会光科技专项行动计划(批准号:036105035)资助的课题~~