摘要
介绍了一种基于PZT压电薄膜的无阀压电微泵。该微泵利用自制的压电圆型薄膜片作为驱动部件、聚二甲基硅氧烷(PDMS)作为泵膜。本文在对微泵制备工艺研究的基础上,对其性能进行了数值和实验研究。建立了基于扩张管/收缩管理论的无阀微泵的有限元模型。利用MFX-AN-SYS/CFX技术实现了对微泵的双向流固耦合分析。对微泵的锥形角、最小宽度、扩散管长度、泵腔高度进行数值计算,得到了优化参数。数值计算的结果与实际测量的数据进行了比较,验证了仿真的正确性。
A valveless piezoelectric micropump based on PZT thin film is presented. Polydimethylsiloxane （PDMS） is used as the membrane and a piezoelectric disk fabricated in our laboratory is used as the actuator of the mieropumpo Based on the theory of diffuser/nozzle, the finite model of mieropump is set up. In order to realize the bidirectional fluid - solid couple analysis for mieropump, MFX - ANSYS/CFX technology to numerical simulations was utilized and optimization paramaters of the angle, the mininal width, length of diffuser and the height of the chamber were obtained. Experiments show good agreement with our simulations.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第4期793-798,共6页
Journal of Functional Materials and Devices
基金
国家科技支撑计划项目(2006BAF04B13)
国家自然科学基金(50675025)
教育部和大连市留学回国人员科研启动基金资助项目
