摘要
本文用He－Ne激光器作光源，由泰曼—格林干涉仪，电视摄相机和微机组成泰曼—电视—微机系统，利用法线象差补偿法检测非球面的原理，根据三个干涉留法，自动地扫描，分析了非球面，其二维等高线和三维面形在计算机监示器上画出。并设计了准万能补偿器以扩大其检测范围，可用于检测一定范围的抛物面，椭圆面和双曲面。补偿精度高于0．01λ。
In this paper,used He -Ne Laser as a light source,a Twyman - TV -Computer system is consisted of Twyman-Green interferometor, TV camera and a computer. with the theory of testing aspherical surface by normal aberration compensation method, according to 3 - interferograms method,aspherical surface is automatically scanned and analyzed. 2 - D contour map and 3-D surface shape are drawn in a computer monitor. Designing a quasiuniversal compensator to extense the testing range. It could be used to measure a certain range of paraboloids, ellipsoids and hyperboloids. The compensation accuracy is mare than o, O1λ.
出处
《长春光学精密机械学院学报》
1997年第4期21-24,共4页
Journal of Changchun Institute of Optics and Fine Mechanics
关键词
非球面
干涉仪
摄相机
补偿
光学表面
面形测试
aspherical surface
compensation method
interferometor
TV-camera
campensation accuracy
