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微悬臂梁谐振式气体传感器研究进展 被引量：4

Progress on micro cantilever resonant gas sensors
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摘要 微机械谐振式传感器已经成为微型机电系统(MEMS)领域的研究热点。讨论了微悬臂梁谐振式气体传感器的工作原理,介绍微悬臂梁表面修饰的关键技术、主要方法和基于微悬臂梁的谐振式气体传感器领域的研究状况以及近五年以来该领域的研究进展,并对基于微悬臂梁的谐振式气体传感器的发展方向和应用前景做了展望。 Micro mechanical resonant sensor is a research focus in MEMS field. The theoretical basis of micro cantilever resonant gas sensor is discussed and the key technologies and general methods of cantilever surface functionalization are introduced. The research status of micro cantilever resonant gas sensor and the research progress in the latest five years are provided. The future development trend and application prospect are forecasted.
作者 高伟 董瑛 尤政
机构地区 清华大学精密仪器与机械学系
出处 《传感器与微系统》 CSCD 北大核心 2008年第11期1-4,共4页 Transducer and Microsystem Technologies
基金 国家自然科学基金资助项目(50605040)
关键词 微悬臂梁 谐振器 气体传感器 表面修饰 micro cantilever resonator gas sensor surface functionalization
分类号 TP212.2 [自动化与计算机技术—检测技术与自动化装置]
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参考文献35

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共引文献12

同被引文献154

  • 1李鹏,李昕欣,王跃林.用于化学气体检测的压阻检测式二氧化硅微悬臂梁传感器[J].传感技术学报,2007,20(10):2174-2177. 被引量：9
  • 2张志祥,李民乾.电场驱动微悬臂生物传感器及对DNA的快速、高灵敏度检测[J].生物化学与生物物理进展,2005,32(4):314-317. 被引量：2
  • 3李凯,刘红,张青川,侯毅,张广照,伍小平.利用微悬臂梁表面应力研究聚N-异丙基丙烯酰胺分子的构象转变[J].物理学报,2006,55(8):4111-4116. 被引量：11
  • 4DAVILA A P, JANG J, GUPTA A K, et al. Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water [ J ]. Biosensors & Bioelectronics, 2007, 22(12) : 3028 -3035.
  • 5GUPTA A, AKIN D, BASHIR R. Single virus particle mass detection using ters, 2004, 84(11) : 1976 -1978.
  • 6with nanoscale thickness [J]. Applied Physics Let- MOULIN A M, O SHEA S J, WELLAND M E. Microcantilever- based biosensors [ J]. Ultramicroscopy, 2000, 82( 1 -4) : 23 -31.
  • 7HWANG K S, JEON H K, LEE S M, et al. Quantification of disease marker in undiluted serum using an actuating layer - embedded microcantilever [ J ]. Journal of Applied Physics, 2009, 105 (10) : 102017.
  • 8MARALDO D, GARCIA F U, MUTHARASAN R. Method for quantification of a prostate cancer biomarker in urine without sample preparation [ J ]. Analytical Chemistry, 2007, 79 (20) : 7683 - 7690.
  • 9MARALDO D, MUTHARASAN R. 10 - minute assay for detecting Escherichia coli O157 : H7 in ground beef samples using piezoelectric - excited millimeter-size cantilever sensors [ J ]. Journal of Food Protection, 2007, 70 (7) : 1670 -1677.
  • 10CAMPBELL G A, UKNALIS J, TU S I, et al. Detect of Escherichia eoli O157 : H7 in ground beef samples using piezoelectric excited millimeter - sized cantilever (PEMC) sensors [ J ]. Biosensors & Bioelectronics, 2007, 22 (7) : 1296 - 1302.

引证文献4

二级引证文献4

传感器与微系统
2008年 第11期

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