摘要
本文首先用离子氮化制备过渡层,然后进行电弧离子镀,通过改变靶的成分来控制涂层的成分,沉积结构成分不同的(Ti,Cr)N复合涂层:(TiCr)N+TiN和CrN+(TiCr)N。采用电子探针(EPMA)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪及微米划痕仪等方法表征了两种复合膜的成分结构和力学性能。测试分析结果表明:由于Cr原子部分取代TiN中的Ti原子及对液滴的轰击碰撞作用,改善细化了涂层的表面微观组织。两种涂层都具有良好的膜基结合性能,后者的弹性模量低于前者,而硬度、韧性及结合性能均高于前者。
The （TiCr）N ＋ TiN（A-coating） and CrN ＋ （TiCr）N （B-coating） composite coatings with different stoichiometries were deposited on plasma-nitrided（PN） high speed steel substrates by arc ion plating. The chemical contents of the coating were controlled by adjusting the chemical contents of the target materials. The microstruetures and mechanical properties of the two types of composite coatings were characterized with X-ray diffraction （XRD）, scanning electron microscopy （SEM）, electron probe micro-analysis（EPMA）, nano indentation and microscratch test. The results show that the interfacial adhesion is very strong, and that the coatings have fairly smooth surface with finer grains, possibly because Cr atom replaces Ti of the TiN and because of ion bombardment of liquid drops on the substrate surface. Moreover, we found that B-coating has lower Young＇s Modulus （EIT）, but higher Viekers Hardness, stronger interfaeial adhesion and toughness than those of A-coating.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第1期96-101,共6页
Chinese Journal of Vacuum Science and Technology
基金
广东省科技计划(No.2006A11002001,No.2007B010600007)
广州市科技计划(No.2005Z3-D2061,No.2006Z2-D0131,No.2006Z3-D0281)
国家自然科学基金重点项目(No.50771045)
