摘要
综合介绍了激光处理聚酰亚胺等高分子聚合物材料及其在微电子工业中一些新的应用，阐述了材料在吸收激光能量后产生的一系列可能会发生的能量转换和一些令人感兴趣的改性。此外还着重介绍了聚酰亚胺材料的激光感应电导在近几年的研究进展以及我们在这方面的研究工作。这一工作在精细加工和微制造工业，尤其是在对提高集成电路的集成度、缩小集成电路内部器件尺寸等方面有广泛的应用前景。
The combination of new materials and new techniques provide a powful surport for the development of microelectronic industry. The new application of laser technique in microeletronic industry, which can reduce the size of device in lithograthy production, was introduced. Some polymers' characteristics and applications in microelectronic industry have been listed. The pathway of energy transportation during the laser-material interaction was illuminated. At last, the recent research progress of laser induced conductivity of polyimide has been reviewed.
出处
《光电子技术》
CAS
1998年第1期66-73,共8页
Optoelectronic Technology
基金
国家自然科学基金!69578019
关键词
聚酰亚胺
激光感应电导
激光加工
VLSI
polyimide, laser induced conductivity, lithograthy production, microeletronic industry
