摘要
分析了软平板印刷技术制作二维光子晶体的特点和方法.利用绝缘PDMS模板,采用软平板印刷技术制造了三角晶系结构的二维聚合物光子晶体,采用同样的技术成功制成尺寸为150～500nm,纵横比达1.25的高密度二维光子晶体.与其他制作技术相比,平板印刷技术具有大尺寸和易于制作的优点.结果表明,制作获得的微结构有很高的保真度.
The characteristic and method of fabricating two-dimensional （2-D） polymer photonic crystals by soft lithography technology were analyzed. Using elastomerie polydimethysiloxane （PDMS） templates, two-dimensional polymer lithography. And the high photonic crystals with density two dimensional triangular lattice structure photonic crystal with feature were fabricated by soft sizes of 150-500 nm and aspect ratios of up to 1.25 were successfully replicated by the same method. Compared with other imprint technology, large field size and easy fabrication are two major advantages of soft lithography. Atomic Force Microscopy images show that the molded structures had high fidelity to the masters.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2009年第1期54-59,共6页
Acta Photonica Sinica
基金
国家自然科学基金(60677027)
教育部博士点基金(20060422025)
国家留学基金委(2005B47011)资助
