摘要
超低速提拉装置是提拉法生长晶体的关键设备,长期稳定、精确低速运行是超低速提拉装置系统设计的重要指标。针对提拉装置低速运行时摩擦转矩的不确定性带来的速度不稳定问题,选择带预紧力的精密滚珠丝杆副和导轨副设计提拉装置;通过负载转矩和转动惯量的计算,合理选择伺服电机,且速度控制回路采用变增益的控制方案。系统设计方案确保了提拉装置的速度跟踪精度,提拉装置实时运行数据表明,速度跟踪误差小于1%,其性能可满足生产要求。
Ultra-low speed lifting device is the key equipment for crystal growth based on Czochralski method, which long-term, stable and accurate low-speed running is an important performance index for the design of ultra-low speed lifting system. To solve the problem of speed instability which results from the uncertainties of friction torque at run time, precised ball screw assembly and linear ball rail system preloaded are chosen for the lifting device design. According to the calculation of moment of inertia and load torque, lifting servo motor is selected and a control scheme of variable gain are adopted in speed control loop. The design of the system ensures speed tracking precision of the lifting device. The real time data show that the tracking errors of speed and displacement are both less than 1% and the performance meets the requirements of production.
出处
《北京石油化工学院学报》
2009年第1期23-27,共5页
Journal of Beijing Institute of Petrochemical Technology
基金
北京石油化工学院青年基金项目资助
项目号:0702
关键词
超低速
晶体生长
伺服控制
ultra-low speed
crystal growth
digital AC servo driver
