摘要
化学气相沉积(Chemical Vapor Deposition,CVD)金刚石膜已广泛用于导弹头罩等军事装备中,但其抛光的难度较大.在研究机械、激光、化学辅助机械、磨料水射流、热化学等典型曲面CVD金刚石膜抛光方法原理和特点的基础上,重点研究了热化学抛光方法,并采用热化学法对导弹头罩金刚石膜进行了抛光试验,结果表明,热化学抛光法能够有效地抛光曲面金刚石膜,抛光效率较高,满足导弹头罩金刚石膜的各项指标要求.
CVD diamond films have been widely used in military equipment of missile dome, but its polishing is difficult. On the basis of different polishing methods for diamond film, including method of machine, laser, chemistry-assisted machine, abrasive water jet and thermo-chemistry, the thermochemical method was studied emphatically. And the polishing experiment was carried out by thermochemical method for missile dome diamond films. The results indicate that thermo-chemical method is the effective way to polish the diamond films of curved surface with high efficiency, which meets the parameter demands of the missile dome diamond films.
出处
《中北大学学报（自然科学版）》
CAS
北大核心
2009年第2期122-126,共5页
Journal of North University of China(Natural Science Edition)
关键词
导弹头罩
金刚石膜
曲面
抛光技术
missile dome
diamond films
curved surface
polishing technology
