摘要
采用溶胶-凝胶法在印有梳状电极的石英玻璃表面涂覆氧化钛纳米薄膜制备湿敏元件,利用LCR测量仪测量薄膜各电学参数随温度、湿度和频率的变化,并分析其复阻抗特性。结果表明:500℃烧结得到的薄膜元件感湿性能较好;相对湿度高于40%时,元件的阻抗模值随着湿度的增大而减小;复阻抗特性表现为半圆形。
Titania films were prepared on the quartz glass whose surface was printed with comb-like Ag electrode and humidity elements were constructed. The humidity-sensing properties and complex impedance of the elements were studied. Experimental results show that,the titania film at 500 ℃ has better performance. The impedance of the humidity element decreases with relative humidity increasing when relative humidity is higher than 40%. And the complex impedance spectra show semicircle.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第4期112-114,共3页
Instrument Technique and Sensor
基金
国家自然科学基金项目(50562003)
关键词
TIO2薄膜
电学性能
复阻抗曲线
TiO2 film
electrical properties
complex impedance spectra
