摘要
基于严格耦合波和增强透射矩阵的方法,提出了一种数值稳定的求解多层介质膜光学特性的机理模型.利用该模型计算了多层介质膜光栅用高反射镜的优化设计膜系.使用电子束热蒸发方式制备的多层介质膜光谱特性和理论设计的结果符合得很好,该严格耦合波模型是分析介质膜光学特性有效的稳定的数值求解方法.
An enhanced, numerically stable transmittance matrix approach based on rigorous coupled wave analysis （RCWA） was applied in the optical character of multi-layer dielectric thin film. A design of high reflective mirror used in multi layer dielectric grating was presented using the method of RCWA. The optics spectral of the fabricated high reflective mirror presents a good agreement with the design which is optimized by employing the rigorous coupled-wave analysis.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2009年第6期1469-1472,共4页
Acta Photonica Sinica
基金
Supported of National Nature Science Foundation of China(10804060)
Project of Shandong Province Higher Educational Science and Technology Program(J08LI05)
关键词
高反射镜
介质膜光栅
严格耦合波分析
High reflective mirror
Multi-layer dielectric grating
Rigorous coupled-wave analysis
