摘要
研究基于螺旋扫描路径的光学镜面磁流变抛光的算法与实现。该算法将去除函数矩阵转化成驻留时间解算的线性方程组的系数矩阵,并利用其为稀疏矩阵的特点来进行快速迭代计算,然后将求得的驻留时间分配到螺旋扫描路径上以求得整个路径上速度变化,从而控制磁流变抛光机床直线轴和转轴作插补运动。利用该算法在自研的KDMRF-200磁流变抛光机床上对一K9玻璃平面镜进行了两次迭代加工,面形均方根误差由初始的0.128λ加工到0.022λ,验证了该算法的正确性和实用性。
The algorithm and implementation of Magnetorheological Finishing with spiral scan mode was researched. The algorithm implemented changes the removal function matrix to the coefficient matrices of the linear system of equations for dwell-time calculation. These equations are resolved quickly because the coefficient matrices are sparse. The variations of speed on the spiral path are obtained by the allocation of the dwell time and the work piece can be processed well using the machine that contains the information about the MRF process. An experiment on a K9 circular plane mirror is made on the KDMRF-200 machine developed by us. The RMS surface error is 0.02λ（λ= 632.8nm） through the 2nd iteration.
出处
《国防科技大学学报》
EI
CAS
CSCD
北大核心
2009年第4期5-9,共5页
Journal of National University of Defense Technology
基金
国家自然科学基金资助项目(50775215)
关键词
磁流变抛光
驻留时间
螺旋扫描路径
magnetorheological finishing
dwell time
spiral scan path
