摘要
综合微电子学及微纳光学的优势,硅基微纳光电子学正在快速走向实用阶段。与微电子制造技术兼容的微纳光子器件,包括调制器、探测器、分束器以及耦合器等均取得了重要的突破。但硅基微纳光源的研究则仍处在探索阶段。外部光源在多大程度上能代替片上光源?片上光源的最佳选择是什么?介绍、分析了目前硅基微纳光源的研究现状及进展,并对片上光源的研究趋势进行展望。
Si based micro-nano optoelectronics is rapidly moving toward commercial applications. Nano- photonic devices compatible with the microelectronics manufacturing technology, including modulators, detectors, splitter and coupler, etc. have made an important breakthrough. However, research on Si light source is still in the exploratory stage. Is the external light source enough for chip size optoelectronic systems？ What will be the better choice as the on-chip light source？ The current research progress and development of Si based micro-nano light source are introduced and analyzed. And the on-chip light source development trends are prospected.
出处
《激光与光电子学进展》
CSCD
北大核心
2009年第10期28-35,共8页
Laser & Optoelectronics Progress
关键词
微纳光电子学
集成光学
硅基光源
micro-nano optoelectronic
integrated optics
Si based light source
