摘要
本文报道了以Ｆｅ（ＣＯ）５和ＳｎＣｌ４为源，采用ＰＥＣＶＤ技术淀积Ｆｅ２Ｏ３－ＳｎＯ２双层薄膜，将该薄膜淀积在陶瓷管上，对氨气的敏感特性进行了测量，并讨论了敏感机理．
Abstract Fe 2O 3 SnO 2 double layer films have been prepared on a porcelain tube by using PECVD technique with Fe(CO) 5 and SnCl 4 as precursors. The sensing characteristics of the thin films to ammonia are measured and its sensing mechanism is discussed.
基金
国家自然科学基金
关键词
半导体
敏感器件
传感器
氨气
敏感薄膜
Ammonia
Plasma enhanced chemical vapor deposition
Semiconducting films
Sensors
