摘要
位置敏感探测器(PSD)的特点是位置测量分辨力高,测量装置建立简单,测量结果比较直观。对PSD测量电路等效噪声进行测试分析,获得一系列模拟结果,明确了电路噪声是影响位置测量分辨力的重要因素。以一维PSD器件S3932为例,按照建立的模拟模型,得出要获得1μm的位置分辨力,器件的工作光电流应大于7μA,该模拟结果可以作为PSD测量电路设计的一个重要参考。
Position Sensitive Detector（PSD） features high position resolution and the setup of position displacement measurement system is simplified. The performance of measurement circuit is the key factor for the application of PSD. Some results are obtained by the way of analyzing the equivalent noise of measurement circuit. The circuit noise is one of the most important factors which will lower the position resolution. For one-dimensional PSD device S3932, the position resolution of 1 μm can be achieved if the photocurrent of the device is above 7 μA.
出处
《信息与电子工程》
2010年第1期96-100,共5页
information and electronic engineering
关键词
位置敏感探测器件
位置分辨力
电路噪声
Position Sensitive Detector
position resolution
circuit noise
