摘要
为了使上海光源(SSRF)研制的SX-700单色器的主要设计指标——波长扫描转角重复精度满足优于0.43″的要求,研究了单色器的波长扫描组件—光栅正弦机构的转角精度误差来源。设计单色器结构时,运用有限元分析软件AN-SYS对光栅正弦机构进行数值模拟计算,并根据模拟结果对光栅正弦机构的转角重复精度进行了误差分析,得到的转角重复精度为0.28″。依据分析结果制定了工程设计方案,并成功加工、装配了SX-700单色器。利用作者建立的一套由光电自准直仪组成的测试系统对光栅正弦机构的转角重复精度进行测试,实测精度为0.15″。结果表明,设计的SSRF的SX-700单色器光栅正弦机构的转角重复精度满足设计要求。
To design a SX-700 monochromator for Shanghai Synchrotron Radiation Facility（SSRF）and to enable its main design index,the rotation angle repeatability of scanning photon energy,to be less than 0.43″,the error sources affecting the rotation angle repeatability of the grating sine mechanism are investigated and then the grating sine mechanism is simulated numerically by using the finite element software ANSYS.The errors for the rotation-angle-repeatability of the grating sine mechanism are analyzed according to the results of the numerical simulation,which shows that the rotation-angle-repeatability is 0.28″.Based on the analysis,a SX-700 monochromator is designed,and the angle repeatability of the grating sine mechanism is measured with an autocollimator system designed by us.Measured results indicate that the rotation angle repeatability of the designed monochromator is 0.15″,which meets the requirements of the grating sine mechanism for the rotation-angle-repeatability.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第1期45-51,共7页
Optics and Precision Engineering
基金
国家大科学工程上海光源工程资助项目(No.SS-06
No.7093XQ070)
关键词
SX-700单色器
正弦机构
转角精度
数值模拟
SX-700 monochromator
sine mechanism
rotation angle repeatability
numerical simulation
