摘要
提出一种采用二次酸腐蚀的多晶Si制绒新方法,首先在HF/HNO3的富HNO3体系中对Si片进行一次腐蚀,之后在富HF体系中进行二次腐蚀,以优化表面织构,减少光在Si表面的反射损失。制绒后,用扫描电子显微镜(SEM)对Si片进行了表面形貌分析,用Carry 5000紫外-可见-近红外分光光度计测量反射谱线,得到未镀减反射膜(ARC)的二次腐蚀制绒的最低反射率为20.34%,比一次腐蚀制绒(22.70%)低2.36%。将二次腐蚀新工艺应用于太阳电池工业制备中,对电池输出参量进行检测分析。结果表明,经过二次腐蚀工艺处理的太阳电池开路电压(VOC)、短路电流(JSC)和效率η均比采用一次腐蚀工艺的太阳电池有不同程度的提高,制成的太阳电池最高效率为14.93%。
A novel approach on the surface treatment of multi-crystalline silicon is reported.The method uses a HNO3-rich HF/HNO3 mixture for the first texturing treatment and a HF-rich HF/HNO3 mixture for the secondan texturing,which results in lower reflectivity on silicon surface.After texturing treatment,scanning electron microscopy（SEM） and Carry 5000 spectrophotometer are utilized to determine optical properties of silicon surface.The reflectivity（without ARC） of wafers using secondary texturing treatment is markedly reduced to 20.34%,compared with conventional treatment of 22.70%.Besides,the novel approach of secondary texturing is used in solar cell fabrication,and electrical properties are measured for evaluation.The results show that comparing with conventional treatment,secondary texturing results in the increases of short circuit current Jsc,open circuit voltage Voc,fill factor FF and efficiency η,the highest efficiency of the solar cells using the optimized secondary texturing treatment is 14.93%.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2010年第3期400-402,共3页
Journal of Optoelectronics·Laser
关键词
多晶Si
太阳电池
二次腐蚀
表面织构
multi-crystalline silicon
solar cell
secondary texturing
surface texturing
