摘要
大口径平面镜在不同姿态下的面形检测一直是激光核聚变领域需致力解决的问题;利用角差法原理设计了一种集高精度测角仪与五棱镜于一体的面形检测系统,面形的变化可通过其各点法线方向角度的变化量而反映出,采用高精度测试角度变化量的方法可计算获知面形轮廓状态;该系统主要由光学子系统、三维运动平台和图像处理等系统组成,实现了大口径平面镜不同姿态下的面形测试,突破常规"以大测大"的高成本检测方法;实验结果表明,水平方向上均方根误差为0.03μm,垂直方向上均方根误差为0.07μm,能满足测试需要。
Topography measurement for large flat mirror under a different angle is an important problem in the field of laser fusion. The method of angle difference testing is used to measure the topography of large flat mirror, the topography would be evaluated by measuring angle change of normal every point on the mirror. The testing method for the topography of high precision large flat mirror in different attitude is presented. The topography is directly tested and the measurement needs no external references, the cost is inexpensive. The system is composed of optical system, 3-dimensional movement system and image processing system. The experimental results show that RMS （root -mean-square error） of horizontal direction is 0.03 micron, RMS of vertical direction is 0. 07 micron.
出处
《计算机测量与控制》
CSCD
北大核心
2010年第4期785-788,共4页
Computer Measurement &Control
基金
国家自然科学基金(1067602910776028)
关键词
面形测试
角差法
五棱镜
topography measurement
method of angle difference testing
pentagonal prism
