摘要
随着吸枪式质谱计检漏法的广泛应用，在有些应用领域中，对正压检漏法的定量性提出了更高的要求。解决正压检漏定量性问题的关键之一，就是要精确地校准正压漏孔。校准正压漏孔的主要方法有：恒压变容法、定容变压法、变容变压法、动态比较法和理论推算法。这些方法既有各自的优点，也存在各自的不足。在实验研究的基础上，对以上各种方法的适用性、局限性、误差分析和尚需解决的问题作一探讨和评价。
With the rapid growing applications of the mass spectrometer leak detector, people demand for better quantitative measurements in pressure leak detection, especially in some high-tech application. The key problem to be solved is the pressure leaks calibration. In this paper, the strengths and weaknesses of various existing calibration methods, including the techniques of the constant pressure, the constant volume, the variational pressure and volume,and the dynamic comparison as well as the theoretical approach,were discussed respectively.
出处
《真空科学与技术》
CSCD
北大核心
1998年第6期444-449,共6页
Vacuum Science and Technology
