摘要
High performance optical coating requires excellent uniformity of thin-film.Keeping the surface of evaporation material flat is propitious for the stability of vapor plume,and can improve the uniformity of thin-film.Based on the principle of electron beam spot sweep,a pattern controller in domestic coater is designed.For the purpose of even evaporation during auto-sweep,the influence of the depth of material surface in the crucible on the evaporation characteristic is considered.Pre-melting and evaporation experiments are performed on melting material（Ti3O5）,subliming material（SiO2）,and semi-melting, semi-subliming material（HfO2）.The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.
High performance optical coating requires excellent uniformity of thin-film.Keeping the surface of evaporation material flat is propitious for the stability of vapor plume,and can improve the uniformity of thin-film.Based on the principle of electron beam spot sweep,a pattern controller in domestic coater is designed.For the purpose of even evaporation during auto-sweep,the influence of the depth of material surface in the crucible on the evaporation characteristic is considered.Pre-melting and evaporation experiments are performed on melting material（Ti3O5）,subliming material（SiO2）,and semi-melting, semi-subliming material（HfO2）.The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.
