摘要
】采用溶胶凝胶法制备了ＴｉＯ２－Ｋ２Ｏ－ＬｉＺｎＶＯ４陶瓷薄膜湿敏元件，研究了薄膜的结构和元件的感湿性能。薄膜主要由金红石型ＴｉＯ２构成，化学组成为Ｔｉ∶Ｋ∶Ｌｉ∶Ｚｎ∶Ｖ∶Ｏ＝１∶０．０４∶０．１∶０．１∶０．１∶２．４２（原子摩尔比）。工作频率为４０Ｈｚ时，湿敏元件在全湿度范围内具有良好的阻抗－湿度特性及电容－湿度特性，感湿特性曲线线性良好。元件还具有灵敏度高，滞后小，响应快，长期稳定性好等优点。工作频率和温度对感湿性能有一定影响。
Humidity sensitive elements based on TiO 2 K 2O LiZnVO 4 ceramic thin films have been prepared by the sol gel technique.The microstrcture of the films and the humidity sensing properties of the elements have been studied.The films,whose composition is Ti∶K∶Li∶Zn∶O=1∶0 04∶0 1∶0 1∶0 1∶2 42,are mainly composed of rutile structure TiO 2.At frequency of 40Hz,the elements' impedance(Zp)and capacitance(Cp)versus relative humidity(rh)values show excellent characteristics in the humidity range tested,and the curves of Log(Zp)～rh and Log(Cp)～rh show excellent linearity.The results also show high sensitivity,small hysteresis,rapid responsibility and great stability over time.Temperature and frequency will affect the humidity sensitive properties obviously.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第1期10-12,16,共4页
Instrument Technique and Sensor
