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MEMS空间光调制器的研究现状与发展趋势 被引量：1

Review and Development Trends of MEMS-based Spatial Light Modulator
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摘要 空间光调制器是自适应光学系统中用来实时校正波前畸变的关键器件,其发展水平能够反映整个自适应光学系统的水平。基于微电子机械系统(MEMS)技术的空间光调制器具有体积小、能耗低、驱动器单元密度高以及与集成电路工艺兼容性好等优点,而成为空间光调制器领域研究的热点。详细介绍了MEMS空间光调制器的研究现状和存在的主要问题,并分析了MEMS空间光调制器的未来发展趋势。 Spatial light modulator is a key component used to correct the wavefront aberration in an adaptive optics system,whose development level can reflect that of the whole adaptive optics system.Micro-electro-mechanical systems（MEMS）based spatial light modulators have advantages of small volume,low power consume,high actuator density and good compatibility with integrated circuit process,and therefore have been the focus of study.The development states,main problems and development tendency of the MEMS based spatial light modulators are presented in this paper.
作者 胡放荣 熊显名
机构地区 桂林电子科技大学电子工程学院
出处 《半导体光电》 CAS CSCD 北大核心 2010年第5期665-669,676,共6页 Semiconductor Optoelectronics
关键词 微电子机械系统 空间光调制器 表面微加工 光束控制 micro-electro-mechanical systems（MEMS） spatial light modulator surface micromachining beam steering
分类号 TN256 [电子电信—物理电子学]
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参考文献21

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二级参考文献37

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半导体光电
2010年 第5期

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