摘要
建立了基于数据采集卡和多路复用器的多轴电动光学调整台控制器,并应用在积分散射仪中。控制器利用数据采集卡的数字输出和计数器脉冲输出功能,分别发送地址信号到多路复用器和脉冲信号到步进电机驱动器,实现了对调整台的点位控制。基于LabView开发了独立的控制软件和可供调用的子程序。控制系统在硬件和软件上都完全集成到积分散射仪中。
A controller of multi-axis motorized optical stages based on DAQ card and Multiplexer was established and applied in total integrated scatterometer.Utilizing DAQ board＇s digital output and counter output to send address signals to multiplexer and pulse signals to stepper motor drivers,the controller provides point-to-point positioning applications for the optical stages.Independent controller software and subroutine program are developed with LabView.the controller＇s hardware and software are completely embedded in the scatterometer.
出处
《激光杂志》
CAS
CSCD
北大核心
2010年第5期38-39,共2页
Laser Journal
