期刊文献+

电容式微机械陀螺双环路闭环驱动电路研究 被引量:8

The Research on the Dual Closed-Loop Driving Circuits for Micro-Machined Gyroscope
在线阅读 下载PDF
导出
摘要 为了提高微机械陀螺系统的检测灵敏度,对微机械陀螺系统的驱动电路进行了研究。分析了微陀螺闭环驱动系统理论,基于此提出一种双环路闭环驱动方法,并且利用数学工具simulink建立系统模型,验证此方法的可行性,最后设计完成相应电路。此方法引入锁相环实现闭环驱动电路的稳频控制;采用自动增益控制器(AGC)实现恒幅控制。利用Hspice完成电路级仿真。结果表明,微机械陀螺双环路闭环驱动电路建立稳定振荡的时间为45ms,稳定振荡频率为2.7553KHz,频率偏差为0.1z,频率抖动为0.056563Hz。相对于传统的AGC闭环驱动电路,此闭环驱动电路建立稳定振荡时间缩短了30.77%,频率稳定性是传统AGC闭环驱动电路的32.72%。微机械陀螺环路闭环驱动电路提高驱动信号性能,对于微机械陀螺检测灵敏度的提高有着重要意义。 In order to improvement the detection sensitivity for micro-machined gyroscope,Studying on the driving circuits of the micro-machined gyroscope the dual closed-loop driving scheme for micro-machined gyroscope is proposed,based on the analysis of the phase theory and amplitude theory,and the scheme is verified by using Simulink model.The related circuits have also been implemented.Considering the characteristics of Phase-Locked Loop(PLL),PLL is applied to adjust the frequency of driving signal in accordance with the resonant frequency in the driving mode;the amplitude control includes peak detector,DC comparator and Variable Gain Amplifier(VGA)to achieve the constant amplitude.The simulation results show that,setting time of stable oscillation is at 45 ms and the stable oscillation frequency is 2.755 3 kHz.The frequency difference between driving frequency and resonant frequency is only 0.1 Hz.Frequency jitter is 0.056 563 Hz.Compared with the traditional closed-loop driving circuits,setting time of the dual closed-loop driving circuits shorten 30.77%.The frequency jitter is 32.72% of the AGC closed-loop driving circuits for micro-machined gyroscope,the dual closed-loop driving circuits for micro-machined gyroscope improved the quality of the driving signal.So it is significative for the improvement of the detection sensitivity for micro-machined gyroscope.
出处 《传感技术学报》 CAS CSCD 北大核心 2010年第10期1449-1453,共5页 Chinese Journal of Sensors and Actuators
关键词 双环路闭环驱动 微机械陀螺 锁相环 可变增益放大器 SIMULINK dual closed-loop driving micro-machined gyroscope PLL VGA simulink
  • 相关文献

参考文献10

  • 1Mikko Saukoski,LASSE Aaltenen,Teemu SALO,et al.Interface and Control Electronics for a Bulk Micromachined Capacitive Gyroscope[J].IEEE Journal of Sensors and Actuators A:Physical,2008,147:183-193.
  • 2Guangjun LIU,Anlin WANG,Tan JIANG,et al.A Novel Tuning Fork Vibratory Microgyroscope with Improved Spring Beams[C]//Nano/Micro Engineered and Molecular Systems,Proceedings of the 3rd IEEE Int.Conf,Sanya,China,2008:257-260.
  • 3Jalpa Shah,Houri Johari,AJIT Sharma,et al.CMOS ASIC for MHz Silicon BAW Gyroscope[J].IEEE,2008:2458-2461.
  • 4Ajit Sharma,Mohamad Faisal Zaman,Farrokh Ayazi.A104-dB Dynamic Range Transimpedance-Based CMOS ASIC for Tuning Fork Microgyroscopes[J].IEEE Journal of Solid-State Circuits,2007:1790-1802.
  • 5Robert P Leland.Adaptive Mode Tuning for Vibrational Gyroscopes[J].IEEE Transactions on Control Systems Technology,2003:242-247.
  • 6Chen Yen-Cheng,Robert T M' Closkey,Tuan A Tran,et al.A Control and Signal Processing Integrated Circuit for the JPL-Boeing Micromachined Gyroscopes[J].IEEE Transactions on Control Systems Technology,2005:286-300.
  • 7DONG Lili,ZHENG Qing,GAO Zhiqiang.A Novel Oscillation Controller for Vibrational MEMS Gyroscopes[C]//American Control Conference,Proceedings of the 2007,New York City,USA,2007:3204-3209.
  • 8Robert T M' Closkey,ALEX Vakakis.Analysis of a Microsensor Automatic Gain Control Loop[C]//Proceedings of the American Control Conference,San Diego,California,June 1999:3307-3311.
  • 9王展飞,鲁文高,李峰,李志宏.MEMS振动陀螺闭环自激驱动的理论分析及数值仿真[J].传感技术学报,2008,21(8):1337-1342. 被引量:21
  • 10FU Sheng-Meng.A Monolithic Sigma-Delta Fractional-N Frequency Synthesizer with Implicit Dual-Path Filter and Phase Switching Multi-Modulus Frequency Divider[J].Analog Integr Circ Sig Process,2007(51):145-153.

二级参考文献11

  • 1John A Geen, Steven J. Sherman, John F. Chang, and Stephen R. Lewis, Single-Chip Surface Micromachined Integrated Gyroscope With 50°/h Allan Deviation[J]. IEEE Journal of Solid-State Circuits, 37(12) : 1860-1866.
  • 2Mikko Saukoshi, Lasse Aaltonen, Kari Halonen, and Teemu Salo, Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors [C]// ISCAS 2005: 5377-5380.
  • 3Navid Yazdi, Farrokh Ayazi, and Khalil Najafi, Micromachined Inertial Sensors [J]. Proceedings of the IEEE, August 1998,86(8) : 1640-1659.
  • 4Sungsu Park, Adaptive Control Strategies for MEMS Gyroscopes[D]. Ph. D Thesis, University of California, Berkeley, 2000.
  • 5Thor N. Juneau, Micromachined Dual Input Axis Rate Gyroscope[D]. Ph. D Thesis, University of California, Berkeley, 1997.
  • 6Sun X, Horowitz R, Komvopoulos K, Stability and Resolution Analysis of a Phase-Locked Loop Natural Frequency Tracking System for MEMS Fatigue Testing[J]. Journal of Dynamic Systems, Measurement, and Control, December 2002, 124: 599-605.
  • 7Loveday P W, Rogers C A, The Influence of Control System Design on the Performance of Vibratory Gyroscopes[J]. Journal of Sound and Vibration (2002) 255(3), 417-432.
  • 8Yen-Cheng Chen, Robert T. M'Closkey, Tuan A. Tran and Brent Blaes A Control and Signal Processing Integrated Circuit for the JPL-Boeing Micromachined Gyroscopes [J]. IEEE Transactions on Control Systems Technology, March 2005,13 (2):286-300.
  • 9Robert T. M'Closkey, Alex Vakakis, Roman Guterrez, Mode Localization Induced by a Nonlinear Control Loop[J]. Nonlinear Dynamic 2001,25:221-236.
  • 10胡寿松主编.自动控制原理.北京:科学出版社.2000.

共引文献20

同被引文献40

  • 1王存超,苏岩,王寿荣.硅微振动陀螺仪驱动器自激驱动研究[J].传感技术学报,2006,19(2):364-366. 被引量:14
  • 2李志鹏,郭勇,沈军.基于DDS技术实现信号发生器[J].微计算机信息,2007,23(19):175-177. 被引量:30
  • 3王寿荣,黄丽斌,杨波.微惯性仪表与微系统[M].北京:兵器工业出版社,2011.
  • 4陈来军,刘锋,梅生伟等.基于无源系统理论的多相APF自适应控制器设计[C].中国高等学校电力系统及其自动化专业第二十五届学术年会论文集,2009:1-4.
  • 5TATAR E,MUKHERJEE T,FEDDER G K. On-chip characterization of stress effects on gyroscope zero rate output and scale factor[ C ]//28th IEEE International. Conference on Micro Electro Mechanical Systems (MEMS) ,2015 : 813 -816.
  • 6SUNG S,YUN S,SUNG W T,et al. A novel control loop design and its application to the force balance of vibratory rate sensor [ J ]. International Journal of Control, Automation and Systems, 2009, 7(4) : 545 -552.
  • 7CUI J,GUO Z,ZHAO Q,et al. Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications [ J ]. Journal of Mieroelectromechanical Systems, 2011,20(6) : 1382 - 1394.
  • 8CHEN F,YUAN W,CHANG H,et al. Design and implementation of an optimized double closed - loop control system for MEMS vibratory gyrosoope[ J]. IEEE Sensors Journal,2014,14(1) : 184 -196.
  • 9PALOMAKI K, NIITI'YLAHTI J, RENFORS M. Numerical sine and cosine synthesis using a complex multiplier [ C ]// IEEE International Symposium on Circuits and Systems, 1999:356 -359.
  • 10郑旭东,曹学成,郑阳明,罗斯建,王跃林,金仲和.一种电容式微机械加速度计的设计[J].传感技术学报,2008,21(2):226-229. 被引量:10

引证文献8

二级引证文献27

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部