摘要
为改善纯WS2薄膜在潮湿大气中的摩擦磨损性能,采用磁控溅射结合离子源的方法在TC4合金基体上沉积了WS2-C复合薄膜,利用扫描电镜、能谱仪对复合薄膜的微观结构及成分组成进行了分析,并利用显微硬度仪和摩擦磨损试验机对复合薄膜的硬度及摩擦磨损性能进行了评估.结果表明:WS2-C复合薄膜的膜面较为平整,断面呈柱状晶方式生长、结构致密,C的原子比约为41%;WS2-C复合薄膜的显微硬度较纯WS2薄膜有所提高,随着法向载荷的加大,其摩擦系数有所降低,C的加入可以提高WS2薄膜在大气环境中的耐磨寿命.
WS2-C composite films were deposited by magnetron sputtering coupled with ion source on TC4 substrates to improve the tribological properties of pure WS2 films. The surface morphology,micro-structure and composition were analyzed using SEM and EDX,and the tribological properties of the composite films were evaluated by using ball-on-disk friction and wear tester. The results show that the surface of the composite films is smooth; the films with carbon content about 41% by atom ratio grow as the stytle of columnar shape; the wear life of the composite films is much longer than the pure WS2 films,and the friction of the composite films becomes lower when the load increases.
出处
《材料研究与应用》
CAS
2010年第4期530-533,共4页
Materials Research and Application
基金
广东省自然科学基金(07006996A)
