摘要
对基于石英玻璃基底制备的TiO2-20%SnO2薄膜湿敏元件进行复阻抗分析,采用Origin7.5软件绘出不同湿度下的复阻抗图。在Zsimpwin软件环境下,利用3种不同的等效电路模型对该湿敏元件的复阻抗图进行拟合和误差分析比较。研究表明:引入Q元件的等效电路模型是合理的,该等效电路模型便于对薄膜离子的扩散与感湿机理进行分析。
20 % Sn4＋-doped Titania films humidity element prepared on the quartz glass substrate was analyzed by using complex impedance analysis, the impedance spectra were protracted in different humidity by Origin7.5 software. Under the Zsimpwin software environment, three different equivalent circuits models were used for fitting the impedance spectra of the element, error analyzing and contrasting. The results show that the equivalent circuit of Q component is reasonable. It is convenient for the analysis of the diffusion of the ion on the thin films and the humidity sensing mechanism.
出处
《传感器与微系统》
CSCD
北大核心
2010年第12期15-18,共4页
Transducer and Microsystem Technologies
基金
内蒙古自治区自然科学基金资助项目(2009MS0912)
关键词
湿敏元件
等效电路模型
复阻抗图
Q元件
humidity element
equivalent circuit model
impedance spectra
Q element
