摘要
介绍了一种新型的基于动态聚焦探测法的光学轮廓仪，该仪器可实现表面形貌的快速、非接触测量，其最大测量范围为５００μｍ，最小分辨率可达１０ｎｍ。文中详细地描述了该轮廓仪的工作原理、关键技术的实现及其应用。
A novel optical stylus profilometer based on dynamic focus detection is introduced.It can measure the surface topography rapidly and non contactly,with the maximum measurement range of 500μm and the resolution of 10nm.The basic principles,key techniques and its applications are described in detail.
出处
《现代计量测试》
1999年第2期10-14,60,共6页
Modern Measurement and Test
基金
国家自然科学基金
关键词
表面形貌
非接触测量
聚焦探测
光针式
轮廓仪
surface topography,non contact measurement,focus detection,servo control
