摘要
介绍了一种适用于微流体系统的电磁驱动无阀微泵。该微泵的泵腔以及扩散口和喷口都采用微机电系统(MEMS)技术进行制备,利用扁平振动马达作为驱动部件,以弹性模量较小的聚二甲基硅氧烷(PDMS)作为振动膜,研制出一个尺寸为12mm×12mm×5mm的微泵。对微泵的振动频率和输出流量进行了测试,结果显示:电压对频率和流量均有显著影响。当电压为1.5V时,微泵的流量达到最大值158μL/min。
A novel electro-magnetically actuated valveless micropump which is suitable for microfluidic system is presented.The MEMS technology is adopted to fabricate the cavity,diffuser and nozzle of the micropump.The flat vibration motor is used as the actuator,and the flexible polydimethylsiloxane（PDMS） is used as the vibration membrane.The size of the micropump is 12mm×12mm×5mm.The vibration frequency and the flow rate of the micropump are measured,and the result shows that the voltage has significant influence on them.When a voltage of 1.5V is applied,the maximum flow rate reaches 158μL/min.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2011年第1期74-77,共4页
Journal of Functional Materials and Devices
基金
首都师范大学开放实验室基金资助
